|
气体 |
测量范围 |
分辨率(针对缺省设置) |
|
乙醛 Acetaldehyde |
0-200 ppm |
1 ppm |
|
乙炔 Acetylene |
0-100 ppm |
1 ppm |
|
丙烯腈 Acrylonitrile |
0-100ppm |
1 ppm |
|
氨气 Ammonia |
0-200 ppm |
1 ppm |
|
胂 Arsine |
0-20 ppm |
0.01 ppm (PH3) |
|
溴 Bromine |
0-20 ppm |
0.05 ppm (Cl2) |
|
丁二烯 Butadiene |
0-100 ppm |
1 ppm |
|
二氧化碳 Carbon Dioxide |
0-5% Vol. |
0.1% Vol. |
|
一氧化碳 Carbon Monoxide |
0-2000 ppm |
1 ppm |
|
一氧化碳 Carbon Monoxide |
0-10,000 ppm |
1 ppm |
|
氯气 Chlorine |
0-20 ppm |
0.05 ppm |
|
二氧化氯 Chlorine Dioxide |
0-20 ppm |
0.05 ppm (Cl2) |
|
乙硼烷 Diborane |
0-1 ppm |
0.01 ppm (PH3) |
|
二乙胺 Diethylamine |
0-100 ppm |
1 ppm |
|
二甲胺 Dimethylamine |
0-100 ppm |
1 ppm |
|
二甲基硫醚 Dimethyl Sulfide |
0-40 ppm |
1 ppm |
|
乙醇 Ethanol |
0-300 ppm |
1 ppm |
|
乙烯 Ethylene |
0-100 ppm |
1 ppm |
|
环氧乙烷 Ethylene Oxide |
0-200 ppm |
1 ppm |
|
甲醛Formadehyde |
0-200 ppm |
1 ppm |
|
氟 Fluorine |
0-20 ppm |
0.05 ppm (Cl2) |
|
锗烷Germane |
0-20 ppm |
0.01 ppm (PH3) |
|
氢气 Hydrogen |
0-2000 ppm |
1 ppm |
|
氰化氢 Hydrogen Cyanide |
0-50 ppm |
0.1 ppm |
|
氟化氢/氯化氢Hydrogen Fluoride/Hydrogen Chloride(需配传感器帽) |
0-30 ppm |
0.1 ppm (HCl) |
|
过氧化氢 Hydrogen Peroxide |
0-20 ppm |
0.1 ppm |
|
硒化氢 Hydrogen Selenide |
0-1 ppm |
0.01 ppm (PH3) |
|
硫化氢 Hydrogen Sulfide |
0-100 ppm |
1 ppm |
|
硫化氢 Hydrogen Sulfide |
0-1000 ppm |
1 ppm |
|
异丁烯 Iso-Butene |
0-300 ppm |
1 ppm |
|
异丙醇Iso-Propyl Alcohol |
0-300 ppm |
1 ppm |
|
甲醇 Methanol |
0-200 ppm |
1 ppm |
|
甲胺 Methyl Amine |
0-100 ppm |
1 ppm |
|
一氧化氮 Nitric Oxide |
0-200 ppm |
1 ppm |
|
二氧化氮Nitrogen Dioxide |
0-50 ppm |
0.1 ppm |
|
氧气 Oxygen |
0-25% Vol. |
0.1% Vol. |
|
光气 Phosgene |
0-3 ppm |
0.01 ppm |
|
磷化氢 Phosphine |
0-20 ppm |
0.01 ppm |
|
磷化氢 Phosphine |
0-1000 ppm |
1 ppm |
|
丙烯 Propylene |
0-100 ppm |
1 ppm |
|
氧化丙烯Propylene Oxide |
0-200 ppm |
0.5 ppm |
|
四氢化硅 Silane |
0-50 ppm |
0.01 ppm (PH3) |
|
苯乙烯 Styrene |
0-100 ppm |
1 ppm |
|
二氧化硫 Sulfur Dioxide |
0-100 ppm |
0.1 ppm |
|
四氢噻吩Tetrahydrothiophene |
0-40 ppm |
1 ppm |
|
特丁醇 tert-Butyl Mercaptan |
0-40 ppm |
1 ppm |
|
三乙胺 Triethylamine |
0-100 ppm |
1 ppm |
|
三甲胺 Trimethylamine |
0-100 ppm |
1 ppm |
|
乙烯基乙酸酯 Vinyl Acetate |
0-100 ppm |
1 ppm |
|
氯乙烯 Vinyl Chloride |
0-100 ppm |
1 ppm |